Tantalum Sputtering Target – Disc
Specifications
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We produce R05200, R05400 targets which meet ASTM B708 standard and we can make targets as per your provided drawings. Taking advantages of our high quality tantalum ingots, advanced equipment, innovative technology, professional team, we tailored your required sputtering targets. You may tell us all your requirements and we dedicated in manufacturing upon your needs.
Type and Size
ASTM B708 Standard Tantalum Sputtering Target , 99.95% 3N5 - 99.99% 4N Purity , Disc Target
Chemical Compositions:
Typical Analysis:Ta 99.95% 3N5 - 99.99%(4N)
Metallic impurities, ppm max by weight
Element | Al | Au | Ag | Bi | B | Ca | Cl | Cd | Co | Cr | Cu | Fe |
Content | 0.2 | 1.0 | 1.0 | 1.0 | 0.1 | 0.1 | 1.0 | 1.0 | 0.05 | 0.25 | 0.75 | 0.4 |
Element | Ga | Ge | Hf | K | Li | Mg | Na | Mo | Mn | Nb | Ni | P |
Content | 1.0 | 1.0 | 1.0 | 0.05 | 0.1 | 0.1 | 0.1 | 5.0 | 0.1 | 75 | 0.25 | 1.0 |
Element | Pb | S | Si | Sn | Th | Ti | V | W | Zn | Zr | Y | U |
Content | 1.0 | 0.2 | 0.2 | 0.1 | 0.0 | 1.0 | 0.2 | 70.0 | 1.0 | 0.2 | 1.0 | 0.005 |
Non-Metallic impurities, ppm max by weight
Element | N | H | O | C |
Content | 100 | 15 | 150 | 100 |
Balance: Tantalum
Grain Size: Typical size<100μm Grain Size
Other grain size available upon request
Flatness: ≤0.2mm
Surface Roughness:< Ra 1.6μm
Surface:Polished
Applications
Coating materials for semiconductors, optics